JPH0322916Y2 - - Google Patents
Info
- Publication number
- JPH0322916Y2 JPH0322916Y2 JP12750586U JP12750586U JPH0322916Y2 JP H0322916 Y2 JPH0322916 Y2 JP H0322916Y2 JP 12750586 U JP12750586 U JP 12750586U JP 12750586 U JP12750586 U JP 12750586U JP H0322916 Y2 JPH0322916 Y2 JP H0322916Y2
- Authority
- JP
- Japan
- Prior art keywords
- contact hole
- insulating film
- film
- conductive
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12750586U JPH0322916Y2 (en]) | 1986-08-20 | 1986-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12750586U JPH0322916Y2 (en]) | 1986-08-20 | 1986-08-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6333629U JPS6333629U (en]) | 1988-03-04 |
| JPH0322916Y2 true JPH0322916Y2 (en]) | 1991-05-20 |
Family
ID=31022321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12750586U Expired JPH0322916Y2 (en]) | 1986-08-20 | 1986-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322916Y2 (en]) |
-
1986
- 1986-08-20 JP JP12750586U patent/JPH0322916Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6333629U (en]) | 1988-03-04 |
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